제 품 소 개

    

  ◈ Spectroscopic
      Ellipsometer

     ▶ MF-1000

     ▶ MG-1000

     ▶ MG-1000-UV

  ◈ Mapping
      Ellipsometer

      ▶ MSE-1000

      ▶ MSE-2000

  ◈ Imaging
      Ellipsometer

  ◈ Industrial       System

      ▶ Rubbins-1000

  ◈ Software

    ▶ Ellyreg

    ▶ LUV

    Rubbins-1000

    Rubbing Inspection for LCD

    • Rubbing Strenth Measurement for Process Control
    • Whole Glass without Rotation, Off-&In Line System

     

    1.Mapping Stage (whole 7- & 8-G glass)
    (1) Travel : 2280 mm X 1920 mm
    (2) Max. speed : 0.5 m/s
    (3) Clean room quality
    (4) Vacuum chuck and booth

    2. Probe Head  
    (1) Measures rubbing strength by spectroscopic retardance measurement (~ 5 sec/spot)


                                                              Insection

    1. 1-D (& 2-D) rubbing strength distribution can be mapped for whole LCD panel.

    2. Deviation by measurement positions is less than 10 %.
    (1) Quick sampling is possible.

    3. Signal difference among different rubbing condition is distinctive.
    4. Underlying important part and/or defect can also be distinctively measured.

    5. In-line or off-line measurement

    6. Thickness, refractive index (n, k), and uniformity for any LCD thin film layer(Optional).