제 품 소 개

    

  ◈ Spectroscopic
      Ellipsometer

    ▶ MF-1000

    ▶ MG-1000
     ▶ MG-1000-UV
   ◈ Mapping
      Ellipsometer
   ▶ MSE-1000

   ▶ MSE-2000

   ◈ Imaging
      Ellipsometer

   ◈ Industrial       System

      ▶ Rubbins-1000

  ◈ Software

    ▶ Ellyreg

    ▶ LUV

    MSE - 2000

    12' Mapping Spetroscopic Ellipsometer

    • Smallest (1/4X) Foot Print & Easy to Use

     

    • Ultra Thin Film Sensitivity compared to Reflectometer

    • Best for Routine Measurement of Most Semiconductor Thin Film

    (Oxide, Dielectrics , Metal, PR, ARC etc.)

     

     

     

    1. Moving head type(patent pending)
    (1) Unlimited sample size& Smallist foot print

    *  Conventional mapping ellipsometer: moving sample type (size limited)

    2. Fast spetroscopic data
    (1) 5 sec for full spetra of ( Ψ, Δ) over 240~850nm
    (2) Multi heads are possible for in-line mass production application

    3. Manually variable angle of incidence: 45°~85° with 5° step

    4. Easiest operation in the world
    (1) Self alignment & calibration
    (2) User-friendly operation and analysis software