Mapping Ellipsometer: MSE-1000

Moving head Spectroscopic Ellipsometer (특허출원)

Automatic control of head SE movement

 - Fast spectroscopic data 

     < 5 sec for full spectra of {D, Y} over 400~850 nm (or 1.5~3.0 eV)

 - Moving head SE size:  18 cm (W)× 22 cm (D)× 5cm (H),  2kg

 - Stage size :  user defined

 - User-friendly operation and analysis softwares

 - Other feature

     ＞ fixed angle of incidence: 70° ± 0.5° 

     ＞ computer (Window 2000, XP): optional