제 품 소 개

   

 ◈ Spectroscopic
      Ellipsometer

     MF-1000

     MG-1000

     MG-1000-UV

◈ Mapping
      Ellipsometer

      MSE-1000

      MSE-2000

 ◈ Imaging
      Ellipsometer

 ◈ Industrial       System

     Rubbins-1000

 ◈ Software

     Ellyreg

     LUV

    Spectroscopic Ellipsometer: MG-1000

     

    Fast Spectroscopic Ellipsometer

    Wide Spectral Range
    • Easy to Operate

    • Best for Semiconductors and Dielectrics

     

     

    - Fast spectroscopic data  
    : < 5 sec for full spectra of {D, Y} over 350~850 nm (or 1.5~3.5 eV)

    UV-option : 250~830 nm (or 1.5~5.0 eV)

     

    - Manually variable angle of incidence: 45~90° with 5° step

     

    - Single body system: 40 cm (W) × 30 cm (D) × 30 cm (H), 15 kg (typical)

    UV-option require external lamp power supply

     

    - Easy operation

    no set-up
    no keys to control

    maintenance-free (except lamp )

     

    - User-friendly operation and analysis softwares

     

    - Other features

    sample size: (5 mm x 5 mm) ~ (200 mm x 200 mm)

    computer (Window 2000, XP): optional
    Auto-collimator for easy alignment: optional