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- Fast
spectroscopic data
: < 5 sec for full spectra of {D, Y} over 350~850 nm (or
1.5~3.5 eV)
- Unique single
body system: no external components to connect : (patented)
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Mobile compact size: 28 cm (W)× 20 cm
(D)× 6 cm (H), 6kg
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Easiest operation in the world
> no set-up
> no keys to control > no
effort for alignment (sample faces down) :
(patented) > no
effort for calibration * : (patented) > maintenance-free (except lamp)
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User-friendly operation and analysis softwares
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Other feature
> fixed angle of incidence: 70° ± 0.5° > sample size: (8 mm x 8 mm) ~ (200 mm x 200 mm) > computer (Window 2000, XP): optional
* Most
ellipsometers require calibration process in each measurement to find the azimuths
of all optical elements. This is a lengthy and
complicated process and causes wrong values.
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