제 품 소 개

    

  ◈ Spectroscopic
      Ellipsometer

    ▶ MF-1000

    ▶ MG-1000

    ▶ MG-1000-UV

  ◈ Mapping
      Ellipsometer

      ▶ MSE-1000

    ▶ MSE-2000

  ◈ Imaging
      Ellipsometer

  ◈ Industrial       System

      ▶ Rubbins-1000

  ◈ Software

    ▶ Ellyreg

    ▶ LUV

    ◈   LUV   ◈
     

    •Lithography for UV
    •     Aerial Image, Resist Profile
    •      Mask CAD Editer, PSM, OAI
    • Process Latitude, Parameter Extraction