제 품 소 개

    

  ◈ Spectroscopic
      Ellipsometer

     ▶ MF-1000

     ▶ MG-1000

     ▶ MG-1000-UV

  ◈ Mapping
      Ellipsometer

      ▶ MSE-1000

      ▶ MSE-2000

  ◈ Imaging
      Ellipsometer

  ◈ Industrial       System

      ▶ Rubbins-1000

  ◈ Software

    ▶ Ellyreg

    ▶ LUV

    Imaging  Ellipsometer

    High Contrast from the Surface

    • Wide Application
    • World smallest Imaging Ellipsometer

     

     

     

    1. Inspection tool for semiconductor processing

    2. Defect inspection such as haze & butting error

    3. Application in biomedical area
    (1)Label-free detection

    4. Manually variable angle of incidence: 45~90¡Æ
    (1) Single body system: 60 cm (W) X 35 cm (D) X 35 cm (H), 15 kg (typical)

    (2) High power LED, quartz halogen lamp ( with filter or monochromator)

    5. Data analysis

    (1) 2D and 3D thickness mapping

    6. Detector

    (1)Digital CCD camera. Resolution 10>bit per pixel, area 400¡¿320

    (2)Wavelength range 400 ~ 800 nm