ellipsometry 란?

   

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     물질명

    Data form

    Specral range

    출처

     ADP(Ammonium Dihydrogen Phosphate)

     AlF3

    e1,e2,nm

    260-800nm

     Chin

    Al2O3(Aluminum Oxide

    e1,e2,nm

    230-800nm

     Chin

    AlON(Aluminum Oxynitride)

    As2Se3(Arsenic Selenide)(crystalline) (vitreous)

     As2S3(Arsenic Sulfide) (crystalline) (vitreous)

     Arsenic Sulfer Glass

     Barium Fluoride

     BaTiO3(Barium Titanate)

     BeO(Beryllium Oxide)

     CaF2(Calcium Fluoride)

     Calcite(Calcium carbonate)

    no,ne,eV

    1.25-6.15eV

    k=0*

     Calcium Molybdate

     Calcium Sulfide (hexagonal)

     Calcium Titanate

     Cesium Bromide

     CeF3

    e1,e2,nm

    230-800nm

     Chin

     (C2H4)n(Polyethylene)

     CsI(Cesium Iodide)

     Cubic Carbon(Diamond)

     Cu2O, CuO(Copper Oxide)

     DLC(Diamond like carbon, a-C:H)

     Fused Silica

     HfF4

    e1,e2,nm

    230-800nm

     Chin

     HfO2 

    e1,e2,nm

    230-800nm

     Chin

     H2O(water)

    ITO(Indium Tin Oxide)

    LaF3 

    e1,e2,nm

    230-800nm

     Chin

    LiF(Lithium Fluoride)

    LiNbO3(Lithium Niobate)

    KBr(Potassium Bromide)

    KCl(Potassium Chloride) 

    KDP(KH2PO4, Potassium Dihydrogen Phosphate)

     MgAl2O4(Magnesium Aluminum Spinel)

     MgF2(Magnesium Fluoride)

     MgO(Magnesium Oxide)

     NaCl(Sodium Chloride)

     NaF(Sodium Fluoride)

     Quartz

     Sapphire(synthetic)

    ScF3

    e1,e2,nm

    230-800nm

     Chin

    ScN(Scandium nitride)

    Sc2O3 

    e1,e2,nm

    230-800nm

     Chin

    CeO2(Cesium Oxide)

    SiO2(Silicon Dioxide) (glass)

    e1,e2,eV

    1.3-7.3eV

    SiO(Silicon  Monoxide)  (noncrystalline)

    Si3N4(Silicon Nitride)  (noncrystalline)

    e1,e2,eV

     1.5-5.0eV

     UNK  

    SiNx(Silicon Nitride)

    SnO2(Tin Oxide)

    SrTiO3(Strontium Titanate)

    Ta2O3(Tantalum Oxide

    e1,e2,eV

    1.5-5.0eV

     Jaerrendahl
    1998 TSF

    ThF4(Thorium Fluoride) 

    ThO2 

    e1,e2,nm

    230-800nm

     Chin

    TiO2(Titanium Dioxide(rutile)

    WO3(Tungsten Oxide) 

     e1,e2,eV

     1.0-5.0eV

    An

    Y2O3(Yttrium Oxide)

    230-800nm

     Chin

    ZnO

    e1,e2,eV

    1.5-4.9eV

     Guha  

    ZnO

    e1,e2,eV

    1.5-4.9eV

     Nagi    

    ZrO2

    e1,e2,nm

    230-800nm

     Chin

     

     

     * For calcite k≠0 when photon energy > 6.25eV

     

     

     

     

    계속업데이트중입니다.

     

     

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